Light emitting device

ABSTRACT

A light emitting device includes a substrate, an electrode connection layer, an epitaxial structure and a plurality of pads. The substrate has an upper surface, a lower surface and a plurality of conductive through holes. The electrode connection layer is disposed on the upper surface of the substrate and has at least one first electrode, at least one second electrode and a connection layer which has at least one buffer region. The epitaxial structure is disposed on the electrode connection layer and electrically connected to the electrode connection layer. The pads are disposed on the lower surface of the substrate and connect with the conductive through holes.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefit of U.S. provisional application Ser. No. 62/081,503, filed on Nov. 18, 2014, U.S. provisional application Ser. No. 62/092,265, filed on Dec. 16, 2014, and Taiwan application serial no. 104114440, filed on May 6, 2015. The entirety of each of the above-mentioned patent applications is hereby incorporated by reference herein and made a part of this specification.

BACKGROUND OF THE INVENTION

Field of the Invention

The invention relates to a semiconductor device, and particularly relates to a light emitting device.

Description of Related Art

Generally, a light emitting chip is composed of an epitaxial structure, N-type electrodes and P-type electrodes, where the N-type electrodes and the P-type electrodes respectively contact an N-type semiconductor layer and a P-type semiconductor layer. In order to expand the application of the light emitting chip, the manufactured light emitting chip is generally disposed on a carrier, and a molding compound is used to package the light emitting chip to form a light emitting device. Generally, the metal bonding is generated by rising the temperature, so as to bond the light emitting chip to the carrier. Because of the mismatch of the thermal expansion coefficient of the light emitting chip and the carrier, the thermal stress generated and the warpage phenomenon gradually become more and more serious, so as to decrease the reliability of the light emitting device.

SUMMARY OF THE INVENTION

The invention provides a light emitting device which has a better reliability.

A light emitting device of the invention includes a substrate, an electrode connection layer, an epitaxial structure and a plurality of pads. The substrate has an upper surface, a lower surface opposite to the upper surface, and a plurality of conductive through holes penetrating through the substrate and connecting to the upper surface and the lower surface. The electrode connection layer is disposed on the upper surface of the substrate and electrically connected to the conductive through holes, the electrode connection layer has at least one first electrode, at least one second electrode and a connection layer disposed between the substrate and the first electrode and disposed between the substrate and the second electrode, and the connection layer has at least one buffer region exposed on the upper surface of the substrate. The epitaxial structure is disposed on the electrode connection layer and electrically connected to the electrode connection layer. The pads are disposed on the lower surface of the substrate and connecting with the conductive through holes.

According to an embodiment of the invention, a center width of the buffer region is smaller than an edge width of the buffer region.

According to an embodiment of the invention, the pads have a distance therebetween, and the width of the buffer region is 0.1 to 1 times the distance between the pads.

According to an embodiment of the invention, the buffer region is a gap, and the width of the gap is 0.3 to 0.7 times the distance between the pads.

According to an embodiment of the invention, the light emitting device further includes an insulating layer disposed on the electrode connection layer and insulating from the first electrode and the second electrode, and the at least one buffer region locates among the insulating layer, the connection layer, and the substrate.

According to an embodiment of the invention, the epitaxial structure further comprises a first type semiconductor layer, a light emitting layer, and a second type semiconductor layer. The first type semiconductor layer is disposed on the insulating layer, and the first electrode penetrates through the insulating layer and is electrically connected to the first type semiconductor layer. The light emitting layer is disposed on the first type semiconductor layer. The second type semiconductor layer is disposed on the light emitting layer, the first type semiconductor layer and the light emitting layer so as to electrically connect to the second type semiconductor layer.

According to an embodiment of the invention, the light emitting device further includes an ohmic contact layer disposed between the first type semiconductor layer and the insulating layer.

According to an embodiment of the invention, the light emitting device further includes a reflection layer disposed between the ohmic contact layer and the insulating layer.

According to an embodiment of the invention, the light emitting device further includes an insulation protection layer covering an edge of the first type semiconductor layer, an edge of the light emitting layer and an edge of the second type semiconductor layer, wherein an edge of the insulation protection layer is aligned with an edge of the insulating layer.

According to an embodiment of the invention, an edge of the electrode connection layer is aligned with an edge of the substrate.

According to an embodiment of the invention, the light emitting device further includes a sheet-like wavelength converting layer disposed on the epitaxial structure, and an edge of the sheet-like wavelength converting layer is aligned with an edge of the substrate.

According to an embodiment of the invention, the epitaxial structure has a rough surface, and the rough surface and the sheet-like wavelength converting layer have micron-scale voids therebetween.

According to an embodiment of the invention, the light emitting device further includes an optical coupling layer disposed between the sheet-like wavelength converting layer and the epitaxial structure.

According to an embodiment of the invention, the optical coupling layer has a rough surface, and the rough surface and the sheet-like wavelength converting layer or/and the epitaxial structure have micron-scale voids therebetween.

According to an embodiment of the invention, the light emitting device further includes a color mixing layer disposed on the sheet-like wavelength converting layer, and an edge of the color mixing layer is aligned with an edge of the sheet-like wavelength converting layer.

According to an embodiment of the invention, each of the conductive through holes and the corresponding electrode connection layer have at least one space therebetween.

According to an embodiment of the invention, the space penetrates through the substrate and connects to the upper surface and the lower surface.

According to an embodiment of the invention, the space extends along a direction from the upper surface to the lower surface and has a bottom surface.

According to an embodiment of the invention, the space locates inside the conductive through hole.

According to an embodiment of the invention, the at least one first electrode is a plurality of the first electrodes, the at least one second electrode is a plurality of the second electrodes, a profile of each of the first electrodes when viewing from atop is in a point shape, and a profile of the second electrodes when viewing from atop is a combination of a point shape and a line shape.

According to an embodiment of the invention, the light emitting device further includes a plurality of electrode pads disposed on the upper surface of the substrate and connecting the conductive through holes and the electrode connection layer, and an orthogonal projection of the electrode pads on the substrate and an orthogonal projection of the connection layer on the substrate are completely overlapped and have a same projected area.

Based on the above, since the electrode connection layer of the invention has the buffer region which can serve as a buffer between the electrode connection layer and other layers having different thermal expansion coefficient from the electrode connection layer under different temperature variation operation, so as to increase the reliability of the light emitting device of the invention.

In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanying figures are described in detail belows.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

FIG. 1A is a schematic cross-sectional view of a light emitting device according to one embodiment of the invention.

FIG. 1B is a schematic top view illustrating a connection layer of a light emitting device according to one embodiment of the invention.

FIG. 2A and FIG. 2B are schematic cross-sectional views of light emitting devices according to another two embodiments of the invention.

FIG. 3A, FIG. 3B, and FIG. 3C are schematic cross-sectional views of light emitting devices according to another three embodiments of the invention.

FIG. 4 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention.

FIG. 5 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention.

FIG. 6 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention.

FIG. 7A-7C are schematic cross-sectional views of light emitting devices according to a plurality of embodiments of the invention.

FIG. 8 is a schematic top view illustrating an electrode connection layer of a light emitting device according to another embodiment of the invention.

FIG. 9 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention.

FIG. 10 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention.

FIG. 11 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention.

FIG. 12 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention.

DESCRIPTION OF THE EMBODIMENTS

FIG. 1A is a schematic cross-sectional view of a light emitting device according to an embodiment of the invention. Referring to FIG. 1A, a light emitting device 100 a in the present embodiment includes a substrate 110 a, an electrode connection layer 120 a, an insulating layer 130, an epitaxial structure E, and a plurality of pads 170. More specifically, the substrate 110 a has an upper surface 112, a lower surface 114 opposite to the upper surface 112, and a plurality of conductive through holes 116 a which penetrate through the substrate 110 a and connect to the upper surface 112 and the lower surface 114. The electrode connection layer 120 a is disposed on the upper surface 112 of the substrate 110 a and electrically connected to the conductive through holes 116 a. In addition, the electrode connection layer 120 a has at least one first electrode 122 a, at least one second electrode 124 a, and a connection layer 126 a which is disposed between the substrate 110 a and the first electrode 122 a and disposed between the substrate 110 a and the second electrode 124 a. Furthermore, the connection layer 126 a has at least one buffer region S exposed on the upper surface 112 of the substrate 110 a. The epitaxial structure E is disposed on the electrode connection layer 120 a and electrically connected to the electrode connection layer 120 a. The pads 170 are disposed on the lower surface 114 of the substrate 110 a and connecting with the conductive through holes 116 a.

To be more specific, the light emitting device 100 a in the present embodiment further includes an insulating layer 130 disposed on the electrode connection layer 120 a and insulating from the first electrode 122 a and the second electrode 124 a, wherein the at least one buffer region S locates among the insulating layer 130, the connection layer 126 a, and the substrate 110 a. Furthermore, the epitaxial structure E in the present embodiment further includes a first type semiconductor layer 140, a light emitting layer 150, and a second type semiconductor layer 160. The first type semiconductor layer 140 is disposed on the insulating layer 130, and the first electrode 122 a penetrates through the insulating layer 130 and is electrically connected to the first type semiconductor layer 140. The light emitting layer 150 is disposed on the first type semiconductor layer 140. The second type semiconductor layer 160 is disposed on the light emitting layer 150, and the second electrode 124 a penetrates through the insulating layer 130, the first type semiconductor layer 140 and the light emitting layer 150 so as to electrically connect to the second type semiconductor layer 160.

To be more specific, the substrate 110 a of the present embodiment can have a good heat dissipation efficiency, the thermal conductivity coefficient of the substrate 110 a is greater than 10 W/m-K, and the substrate 110 a can also be an insulation substrate with resistivity greater than 10¹⁰ Ω·m. In the present embodiment, the substrate 110 a is, for example, a ceramic substrate or a sapphire substrate. Preferably, the substrate 110 a is a ceramic substrate with a good heat dissipation effect and insulation effect. The thickness of the substrate 110 a is, for example, between 100 μm and 700 μm, and preferably between 100 μm and 300 μm. As shown in FIG. 1A, the conductive through holes 116 a of the present embodiment are formed by filling a conductive material such as copper, gold, etc in the through holes of the substrate 110 a. The two opposite ends of the conductive through holes 116 a of the substrate 110 a are electrically connected to the electrode connection layer 120 a and the pads 170 respectively, and the cross-sectional profile of the conductive through holes 116 a may have different shapes according to the fabrication method thereof. For example, if a mechanical drilling method is adopted, the presented cross-sectional profile of each of the conductive through holes 116 a is a rectangle (not shown); if a laser drilling method is adopted, the presented cross-sectional profile of each of the conductive through holes 116 a is a trapezoid, which is shown in FIG. 1A. However, if the laser drilling method is adopted, an ablation direction of laser light also influences the cross-sectional profile of the conductive through holes. For example, if the laser light irradiates the upper surface 112 of the substrate 110 a, the cross-sectional profile of each of the conductive through holes 116 a presents an inverted trapezoid with a wide opening at top and a narrow opening at bottom (not shown); and if the laser light irradiates the lower surface 114 of the substrate 110 a, the cross-sectional profile of each of the conductive through holes 116 a presents a trapezoid with a narrow opening at top and a wide opening at bottom, which is shown in FIG. 1A. The cross-sectional profiles of the conductive through holes 116 a are all within a protection range of the invention, and the invention is not limited to the cross-sectional profiles of the conductive through holes 116 a shown in the present embodiment.

Moreover, the first electrode 122 a of the electrode connection layer 120 a of the present embodiment is, for example, a P-type electrode, and the second electrode 124 a is, for example, an N-type electrode, though the invention is not limited thereto. The material of the first electrode 122 a and the second electrode 124 a can be selected from titanium, tin, indium, chromium, platinum, gold, an alloy of materials selected from above materials, or a combination of the above materials. However, the connection layer 126 a is disposed between the substrate 110 a and the first electrode 122 a and disposed between the substrate 110 a and the second electrode 124 a, and the material of the connection layer 126 a can be selected from titanium, gold, indium, tin, chromium, platinum, an alloy of materials selected from above materials or a combination of the above materials. It should be noticed that the first electrodes 122 a, the second electrodes 124 a and the connection layer 126 a can be made of a same material, different materials, and can be made integrally or separately, which is not limited by the invention. In the present embodiment shown in FIG. 1A, the area of the orthogonal projection of the portion of the connection layer 126 a connecting to the second electrode 124 a on the substrate 110 a is greater than the area of the orthogonal projection of the portion of the connection layer 126 a connecting to the first electrode 122 a on the substrate 110 a. In other words, the area of the portion of the connection layer 126 a connecting to the second electrode 124 a is greater than the area of the portion of the connection layer 126 a connecting to the first electrode 122 a. Specifically, the first electrode 122 a and the second electrode 124 a in the present embodiment are located on the same side which is a side of the first type semiconductor layer 140.

In the present embodiment, the buffer region S locates among the connection layer 126 a, the substrate 110 a, and the insulating layer 130. FIG. 1B is a schematic top view illustrating a connection layer of a light emitting device according to one embodiment of the invention. Referring to FIG. 1B, the thickness of the buffer region S is embodied by the distance between the portion of the connection layer 126 a connecting to the first electrode 122 a and the portion of the connection layer 126 a connecting to the second electrode 124 a. Because a center width CS of the buffer region S in the light emitting device 100 a is smaller than an edge width ES of the buffer region S in the light emitting device 100 a, the buffer region area close to the edge of the light emitting device 100 a is greater than the buffer region area at the center of the light emitting device 100 a, so that the stress between the substrate 110 a and the connection layer 126 a is easily released on the edge of the light emitting device 100 a and can not be accumulated inside the light emitting device 100 a.

Referring to FIG. 1A again, the pads 170 have a distance therebetween, and the width of the buffer region S is 0.1 to 1 times the distance between the pads 170. Preferably, the buffer region S is a gap, and the width of the gap is 0.3 to 0.7 times the distance between the pads 170. Since the thickness of the buffer region S is smaller than the distance between the pads 170, the area of the connection layer 126 a become larger, so as to provide a good connection between the connection layer 126 a and the substrate 110 a, to transfer the thermal energy generated by the epitaxial structure E to the substrate 110 a faster, and to avoid high temperature and decreasing light emitting efficiency of the epitaxial structure E. Because the environment temperature in the fabrication process can vary, the buffer region S can serve as a buffer between the electrode connection layer 120 a and other layers having different thermal expansion coefficient, such as the substrate 110 a, the conductive through hole 116 a, or the insulating layer 130, so as to increase the positioning accuracy between the electrode connection layer 120 a and other layers, and to increase the reliability of the light emitting device 100 a in the present embodiment. It should be noted that, the area of the orthogonal projection of the buffer region S and the connection layer 126 a on the substrate 110 a is equal to the area of the upper surface 112 of the substrate 110.

In addition, the epitaxial structure E in the present embodiment, the first type semiconductor layer 140 is, for example, a P-type type semiconductor layer, and the second type semiconductor layer 160 is, for example, an N-type type semiconductor layer, but the invention is not limited thereto. In addition, the edge of the epitaxial structure E is smaller than or equal to the edge of the substrate 110 a, preferably the projected area of the epitaxial structure E on the substrate 110 a is 0.8 to 1 times the area of the upper surface 112 of the substrate 110 a. The thickness of the epitaxial structure E is between 3 μm and 15 μm, and preferably between 4 μm and 8 μm. Otherwise, since the pads 170 in the present embodiment are located on the lower surface 114 of the substrate 110 a, the light emitting device 100 a can be connected to an external circuit (not shown) through the pads 170, the heat generated by the light emitting device 100 a can be transferred quickly through the pads 170 to the outside. Otherwise, an edge 121 of the electrode connection layer 120 a and an edge 111 of the substrate 110 a are aligned in the present embodiment as shown in FIG. 1A. Therefore, the total thickness of the light emitting device 100 a in the present embodiment becomes smaller, so that the volume of the light emitting device 100 a also becomes smaller.

It should be noticed that reference numbers of the components and a part of contents of the aforementioned embodiment are also used in the following embodiment, wherein the same reference numbers denote the same or like components, and descriptions of the same technical contents are omitted. The aforementioned embodiment can be referred for descriptions of the omitted parts, and detailed descriptions thereof are not repeated in the following embodiment.

FIG. 2A is a cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 1A and FIG. 2A, the light emitting device 100 b 1 of the present embodiment is similar to the light emitting device 100 a in FIG. 1A, and a main difference therebetween is that the light emitting device 100 b 1 of the present embodiment further includes a sheet-like wavelength converting layer 180 a disposed on the epitaxial structure E, and an edge 181 of the sheet-like wavelength converting layer 180 a and an edge 111 of the substrate 110 a are substantially aligned. Herein, the extending direction of the sheet-like wavelength converting layer 180 a and the extending direction of the substrate 110 a are substantially the same. As shown in FIG. 2A, the extending direction of the sheet-like wavelength converting layer 180 a and the extending direction of the substrate 110 a are all lateral extending directions, and the sheet-like wavelength converting layer 180 a has two opposite flat surfaces S1, S2. In other words, the sheet-like wavelength converting layer 180 a of the present embodiment substantially is a planar structure. Moreover, a thickness of the sheet-like wavelength converting layer 180 a of the present embodiment is between 5 μm and 80 μm, and preferably between 20 μm and 60 μm. Herein, the sum of the thickness of the sheet-like wavelength converting layer 180 a and the thickness of the epitaxial structure E is preferably smaller than 100 μm. Compared to the conventional light emitting device that the epitaxial structure has a thickness of more than 100 μm, the light emitting device 100 b 1 of the present embodiment can have a smaller volume.

Since the sheet-like wavelength converting layer 180 a of the present embodiment is embodied by a planar structure, the edge 181 of the sheet-like wavelength converting layer 180 a and the edge 111 of the substrate 110 a are substantially aligned. Therefore, compared to the conventional method that a molding compound is used to package the light emitting chip to form an arc-shaped molding compound of the light emitting device, the light emitting device 100 b 1 in the present embodiment can have a smaller volume. Moreover, in order to improve a light emitting efficiency of the whole light emitting device 100 b 1, diffusing particles or reflecting particles can be added to the sheet-like wavelength converting layer 180 a, so as to achieve a light scattering effect and a light reflecting effect, which is still within the protection range of the invention. In addition, since the sheet-like wavelength converting layer 180 a of the present embodiment is embodied by a planar structure, a light emitting angle of the whole light emitting device 100 b 1 is, for example, smaller than 140 degrees, so that the light emitting device 100 b 1 has a good light source collimation property, and has good flexibility in application of subsequent optical design.

FIG. 2B is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 2A and FIG. 2B, the light emitting device 100 b 2 of the present embodiment is similar to the light emitting device 100 b 1 in FIG. 2A, and a main difference therebetween is that the epitaxial structure E of the light emitting device 100 b 2 of the present embodiment has a rough surface E1, and the rough surface E1 and the sheet-like wavelength converting layer 180 a have micron-scale voids therebetween. Namely, the surface of the epitaxial structure E contacting the sheet-like wavelength converting layer 180 a is a non-flat surface, the light generated by the epitaxial structure E has a scattering effect through the micron-scale voids, and according to such design, the light generated by the epitaxial structure E has the scattering effect, so as to improve the light emitting uniformity of the whole light emitting device 100 b 2 effectively. Moreover, the micron-scale voids between the epitaxial structure E and the sheet-like wavelength converting layers 180 a can serve as a buffer therebetween, so that the epitaxial structure E and the sheet-like wavelength converting layer 180 a have a good bonding effect therebetween, so as to improve reliability of the light emitting device 100 b 2. It should be noted that if the size of the voids between the epitaxial structure E and the sheet-like wavelength converting layer 180 a is smaller than the micro-scale, for example, smaller than 0.1 μm, the voids are too small, the scattering effect is not good, and if the size of the voids is greater than the micro-scale, for example, greater than 10 μm, the voids are too large, and a bonding effect between the epitaxial structure E and the sheet-like wavelength converting layer 180 a is not good.

FIG. 3A is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 2A and FIG. 3A, the light emitting device 100 c 1 of the present embodiment is similar to the light emitting device 100 b 1 in FIG. 2A, and a main difference therebetween is that the light emitting device 100 c 1 of the present embodiment further includes an optical coupling layer 190 c 1, and the optical coupling layer 190 c 1 is disposed between the sheet-like wavelength converting layer 180 a and the second type semiconductor layer 160 of the epitaxial structure E, so as to increase light emitting efficiency of the light emitting device 100 c 1. Herein, the optical coupling layer 190 c 1 has a thickness smaller than 10 μm, and can serve as a buffer between the epitaxial structure E and the sheet-like wavelength converting layer 180 a, and implement a good bonding effect between the epitaxial structure E and the sheet-like wavelength converting layer 180 a. Herein, an edge of the optical coupling layer 190 c 1 is aligned with an edge of the second type semiconductor layer 160 of the epitaxial structure E.

Moreover, the material of the optical coupling layer 190 c 1 of the present embodiment is, for example, nitride material, such as gallium nitride; or the material of the optical coupling layer 190 c 1 is the same as the material of the second type semiconductor layer 160, so as to have a good bonding effect, but the invention is not limited thereto. In addition, in order to increase the light emitting efficiency of the whole light emitting device 100 c 1, the material of the optical coupling layer 190 c 1 can be a material having a similar refractive index to the second type semiconductor layer 160, the refractive index of the optical coupling layer 190 c 1 can be changed to be smaller than the refractive index of the second type semiconductor layer 160 and to be greater than the refractive index of the sheet-like wavelength converting layer 180 a by adding diffusing particles, reflective particles, scattering particles, or at least two types of the mentioned particles to the optical coupling layer 190 c 1, so as to increase light emitting efficiency, which is still within the protection range of the invention.

FIG. 3B is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 3A and FIG. 3B, the light emitting device 100 c 2 of the present embodiment is similar to the light emitting device 100 c 1 in FIG. 3A, and a main difference therebetween is that the optical coupling layer E of the light emitting device 100 c 2 of the present embodiment has a rough surface E1, and the rough surface E1 and the optical coupling layer 190 c 1 have micron-scale voids therebetween. The contact surface between the epitaxial structure E and the optical coupling layer 190 c 1 is a non-flat surface. Since the light generated by the epitaxial structure E through the micron-scale voids has a scattering effect, so that the light ray can enter the optical coupling layer 190 c 1 uniformly, and according to such design, the light generated by the epitaxial structure E has a better scattering effect, so as to improve the light emitting uniformity of the whole light emitting device 100 c 2 effectively. In addition, the voids between the optical coupling layer 190 c 1 and the epitaxial structure E can serve as a buffer space between the two different layers, so that the epitaxial structure E and the optical coupling layer 190 c 1 have a good bonding effect therebetween. It should be noted that if the size of the voids between the epitaxial structure E and the optical coupling layer 190 c 1 is smaller than the micro-scale, for example, smaller than 0.1 μm, the voids are too small, the scattering effect is not good, and if the size of the voids is greater than the micro-scale, for example, greater than 10 μm, the voids are too large, and a bonding effect between the epitaxial structure E and the optical coupling layer 190 c 1 is not good.

FIG. 3C is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 3C and FIG. 3A, the light emitting device 100 c 3 of the present embodiment is similar to the light emitting device 100 c 1 in FIG. 3A, and a main difference therebetween is that the optical coupling layer 190 c 3 of the light emitting device 100 c 3 has a rough surface 191, and the rough surface 191 and the sheet-like wavelength converting layer 180 a or the epitaxial structure E have micron-scale voids therebetween. Herein, the rough surface 191 and the sheet-like wavelength converting layer 180 a have micron-scale voids therebetween. Namely, the surface of the optical coupling layer 190 c 3 contacting the sheet-like wavelength converting layer 180 a is a non-flat surface, and according to such design, the light generated by the epitaxial structure E has a better scattering effect, so as to improve the light emitting uniformity of the whole light emitting device 100 c 3 effectively. Moreover, the micron-scale voids between the optical coupling layer 190 c 3 and the sheet-like wavelength converting layer 180 a can serve as a buffer space between the two different layers, so that the optical coupling layer 190 c 3 and the sheet-like wavelength converting layer 180 a have a good bonding effect therebetween, so as to improve the reliability of the light emitting device 100 c 3. It should be noted that the optical coupling layer 190 c 3 can have two rough surfaces, one rough surface and the sheet-like wavelength converting layer 180 a can have micron-scale voids therebetween, and simultaneously another rough surface and the epitaxial structure E can have micron-scale voids therebetween (not shown), so as to achieve a good bonding effect between the optical coupling layer 190 c 3, the sheet-like wavelength converting layer 180 a, and the epitaxial structure E and improve the reliability of the light emitting device 100 c 3, but the invention is not limited thereto.

FIG. 4 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 4 and FIG. 2A, the light emitting device 100 d of the present embodiment is similar to the light emitting device 100 b 1 in FIG. 2A, and a main difference therebetween is that the light emitting device 100 d of the present embodiment further includes an optical coupling layer 190 d, and the optical coupling layer 190 d is located between the sheet-like wavelength converting layer 180 a and the second type semiconductor layer 160 of the epitaxial structure E and has a patterned rough surface 191. The optical coupling layer 190 d and the sheet-like wavelength converting layer 180 a have at least one void B therebetween. As shown in FIG. 4, the optical coupling layer 190 d of the present embodiment has a cross-sectional pattern, which is a structure constructed by a periodic triangular pattern, and a void B exists between two adjacent triangular patterns; however, in other not shown embodiments, the cross-sectional pattern of the optical coupling layer can have different shapes and can be arranged non-periodically, which is still within the protection range of the invention. Since the optical coupling layer 190 d and the sheet-like wavelength converting layer 180 a have a non-flat contact, based on such design, the light generated by the epitaxial structure E has the better scattering effect, so as to improve the light emitting uniformity of the whole light emitting device 100 d. Moreover, the space between the optical coupling layer 190 d and the sheet-like wavelength converting layer 180 a can serve as a buffer space between two different layers, so that the epitaxial structure E and the sheet-like wavelength converting layer 180 a have a good bonding effect therebetween, so as to improve the reliability of the light emitting device 100 d.

FIG. 5 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 5 and FIG. 2A, the light emitting device 100 e of the present embodiment is similar to the light emitting device 100 b 1 in FIG. 2A, and a main difference therebetween is that the sheet-like wavelength converting layer 180 e of the light emitting device 100 e includes at least two sheet-like wavelength converting unit layers, and the emission peak wavelengths of the sheet-like wavelength converting unit layers are progressively decreased along a direction away from the epitaxial structure E. In the present embodiment, the at least two sheet-like wavelength converting unit layers are three sheet-like wavelength converting unit layers, and the sheet-like wavelength converting unit layers include a first sheet-like wavelength converting unit layer 182 e, a second sheet-like wavelength converting unit layer 184 e and a third sheet-like wavelength converting unit layer 186 e sequentially stacked on the second type semiconductor layer 160. The emission peak wavelength of the first sheet-like wavelength converting unit layer 182 e is greater than the emission peak wavelength of the second sheet-like wavelength converting unit layer 184 e, and the emission peak wavelength of the second sheet-like wavelength converting unit layer 184 e is greater than the emission peak wavelength of the third sheet-like wavelength converting unit layer 186 e. With this arrangement, the light transformed by passing through the first sheet-like wavelength converting unit layer 182 e having greater emission peak wavelength can not be absorbed by the second and the third sheet-like wavelength converting unit layers 184 e, 186 e having shorter emission peak wavelength, etc. For example, when the epitaxial structure E emits a blue light, the first sheet-like wavelength converting unit layer 182 e is, for example, a red light sheet-like wavelength converting unit layer, the second sheet-like wavelength converting unit layer 184 e is, for example, a yellow light sheet-like wavelength converting unit layer, and the third sheet-like wavelength converting unit layer 186 e is, for example, a green light sheet-like wavelength converting unit layer, by which light emitting uniformity and color rendering of the whole light emitting device 100 e are enhanced. Certainly, in other embodiments, the first sheet-like wavelength converting unit layer 182 e, the second sheet-like wavelength converting unit layer 184 e, and the third sheet-like wavelength converting unit layer 186 e can be sheet-like wavelength converting unit layers of other colors, and the colors are not limited by the invention. Particularly, the extending direction of the first sheet-like wavelength converting unit layer 182 e, the second sheet-like wavelength converting unit layer 184 e and the third sheet-like wavelength converting unit layer 186 e is the same to the extending direction of the substrate 110 a. The first sheet-like wavelength converting unit layer 182 e, the second sheet-like wavelength converting unit layer 184 e, the third sheet-like wavelength converting unit layer 186 e and the substrate 110 a are all laterally extended planar structures, so that the whole light emitting device 100 e has a smaller volume.

FIG. 6 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 6 and FIG. 5, the light emitting device 100 f of the present embodiment is similar to the light emitting device 100 e of FIG. 5, and a main difference therebetween is that in the sheet-like wavelength converting layer 180 f of the present embodiment, a thickness of the first sheet-like wavelength converting unit layer 182 f, a thickness of the second sheet-like wavelength converting unit layer 184 f, and a thickness of the third sheet-like wavelength converting unit layer 186 f are all different from each other. Preferably, the thickness of the sheet-like wavelength converting layers increase along a direction away from the epitaxial structure E. With this arrangement, the light transformed by passing through the first sheet-like wavelength converting unit layer 182 f having greater emission peak wavelength can not be absorbed by the second and the third sheet-like wavelength converting unit layers 184 f, 186 f having shorter emission peak wavelength, so that every layers do not need to have the same thickness to achieve a high color rendering and a high efficiency of light emitting uniformity. For example, when the first sheet-like wavelength converting unit layer 182 f is a red light sheet-like wavelength converting unit layer, the second sheet-like wavelength converting unit layer 184 f is a green light sheet-like wavelength converting unit layer, and the thickness of the first sheet-like wavelength converting unit layer 182 f is 0.2 to 0.4 times the thickness of the second sheet-like wavelength converting unit layer 184 f, a usage amount of red phosphor powder with higher cost is decreased, so as to effectively decrease a manufacturing cost of the whole light emitting device 100 f.

FIG. 7A is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 7A and FIG. 2A, the light emitting device 100 g 1 of the present embodiment is similar to the light emitting device 100 b 1 in FIG. 2A, and a main difference therebetween is that each of the conductive through holes 116 g of the substrate 110 g in the present embodiment has at least one space 117 g 1 (two spaces are shown in FIG. 7). Moreover, the space 117 g 1 can be a buffer between layers having different thermal expansion coefficients under processes in different temperatures, such as between the conductive through hole 116 g and the electrode connection layer 120 a, and between the conductive through hole 116 g and the pad 170. The spaces 117 g 1 in FIG. 7A can be close to or connected to the upper surface 112 or the lower surface 114 of the substrate 110 g, but the invention is not limited thereto.

FIG. 7B is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 7B and FIG. 7A, the light emitting device 100 g 2 of the present embodiment is similar to the light emitting device 100 g 1 in FIG. 7A, and a main difference therebetween is that the space 117 g 2 of each of the conductive through holes 116 g in the present embodiment extends along a direction from the upper surface 112 of the substrate 110 g to the lower surface 114 thereof and has a bottom surface 118. In other words, the space 117 g 2 of each of the conductive through holes 116 g has an opening O facing the upper surface 112. The opening O connects the conductive through hole 116 g and the electrode connection layer 120 a, and can serve as a buffer between two layers with different thermal expansion coefficients such as the conductive through hole 116 g and the electrode connection layer 120 a under processes in different temperatures.

FIG. 7C is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 7C and FIG. 7A, the light emitting device 100 g 3 of the present embodiment is similar to the light emitting device 100 g 1 in FIG. 7A, and a main difference therebetween is that the space 117 g 3 of each of the conductive through holes 116 g of the present embodiment is a through hole penetrating through the substrate 110 g and connecting the upper surface 112 and the lower surface 114. In other embodiments that are not illustrated, the spaces 117 g 1, 117 g 2, 117 g 3 can exists inside the conductive through hole 116 g without contacting the electrode connection layer 120 a or the pads 170, and it is considered to be within the scope of the invention as long as a space exists between the conductive through hole 116 a and the electrode connection layer 120 a or the pads 170 to serve as a buffer.

FIG. 8 is a schematic top view illustrating an electrode connection layer of a light emitting device according to another embodiment of the invention. Referring to FIG. 8, the light emitting device 100 h of the present embodiment has a plurality of first electrodes 122 h and a plurality of second electrodes 124 h, a profile of each of the first electrodes 122 h when viewing from atop is in a point shape, and a profile of the second electrodes 124 h when viewing from atop is a combination of a point shape and a line shape. The second electrodes 124 h of the present embodiment simultaneously have electrodes with a point-shaped profile and electrodes with a line-shaped profile, and as shown in FIG. 8, these electrode patterns are separated from each other. Since the portion of the second electrodes 124 h contacting to the epitaxial structure E in the light emitting device 100 h of the present embodiment have the electrode patterns with point shapes and line shapes, a current distribution can be more even and a forward voltage can be effectively decreased.

FIG. 9 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 9 and FIG. 3A, the light emitting device 100 i of the present embodiment is similar to the light emitting device 100 c 1 in FIG. 3A, and a main difference therebetween is that the light emitting device 100 i of the present embodiment further includes an ohmic contact layer 210 disposed between the first type semiconductor layer 140 and the insulating layer 130. In addition, the light emitting device 100 i further includes a reflection layer 220 disposed between the ohmic contact layer 210 and the insulating layer 130. Here, configuration of the ohmic contact layer 210 can effectively enhance electrical contact between the first type semiconductor layer 140 and the reflection layer 220, where a material of the ohmic contact layer 210 is, for example, nickel or nickel oxide. The material of the reflection layer 220 is, for example, silver, which is adapted to reflect the light of the light emitting layer 150 to achieve a good light emitting efficiency. Particularly, the ohmic contact layer 210 may have a patterned structure, such as a profile pattern embodied by a periodic island-shaped pattern (not shown), i.e. The spaces exist between the ohmic contact layer 210 and the first type semiconductor layer 140 and between the first electrode 122 a and the reflection layer 220, so as to increase electrical connection and bonding between the ohmic contact layer 210 and the first type semiconductor layer 140 and between the first electrode 122 a and the reflection layer 220. Moreover, a thickness of the ohmic contact layer 210 and a thickness of the reflection layer 220 of the present embodiment is, for example, between 1000 Å and 7000 Å, and preferably between 1000 Å and 3500 Å.

FIG. 10 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 10 and FIG. 9, the light emitting device 100 j of the present embodiment is similar to the light emitting device 100 i in FIG. 9, and a main difference therebetween is that the light emitting device 100 j of the present embodiment further includes an insulation protection layer 230 which covers an edge of the first type semiconductor layer 140, an edge of the light emitting layer 150, and the edge of the second type semiconductor layer 160, and an edge 231 of the insulation protection layer 230 and an edge of the insulating layer 130 are substantially aligned. Herein, the material of the insulation protection layer 230 can be silicon dioxide, silicon nitride, and a combination of two materials thereof. The insulation protection layer 230 is configured to effectively protect the edge of the epitaxial structure E, so as to avoid invasion of vapor and oxygen, and effectively improve product reliability of the whole light emitting device 100 j. Particularly, the insulation protection layer 230 of the present embodiment further covers edges of the ohmic contact layer 210 a and the reflection layer 220, so as to achieve better reliability of the light emitting device 100 j. It should be noticed that the insulation protection layer 230 and the insulating layer 130 can be disposed integrally, which is not limited by the invention.

FIG. 11 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 11 and FIG. 10, the light emitting device 100 k of the present embodiment is similar to the light emitting device 100 j in FIG. 11, and a main difference therebetween is that the light emitting device 100 k of the present embodiment further includes a color mixing layer 240 disposed on the sheet-like wavelength converting layer 180 a. In the present embodiment, the color mixing layer 240 is made of a transparent material, for example, glass, sapphire, epoxy resin or silicon, and a thickness of the color mixing layer 240 is greater than 100 μm. In other words, the thickness of the color mixing layer 240 is greater than the thickness of the epitaxial structure E plus the thickness of the sheet-like wavelength converting layer 180 a. The color mixing layer 240 with a thicker thickness can be regarded as a light guiding layer, and can uniformly mix the light emitted by the epitaxial structure E and converted by the sheet-like wavelength converting layer 180 a, so as to effectively enhance the light emitting uniformity of the light emitting device 100 k.

FIG. 12 is a schematic cross-sectional view of a light emitting device according to another embodiment of the invention. Referring to FIG. 12 and FIG. 1A, the light emitting device 100 l of the present embodiment is similar to the light emitting device 100 a in FIG. 1A, and a main difference therebetween is that the light emitting device 100 l of the present embodiment further includes a plurality of electrode pads 172 disposed on the upper surface 112 of the substrate 110 a and connecting the conductive through hole 116 a and the electrode connection layer 120 a. In addition, the orthogonal projection of the buffer region S on the substrate 110 a does not overlap the orthogonal projection of the electrode pad 172 of the substrate 110 a. To be more specific, the electrode pads 172 and the connection layer 126 a of the electrode connection layer 120 a are disposed correspondingly, an orthogonal projection of the electrode pads 172 on the substrate 110 a and an orthogonal projection of the connection layer 126 a on the substrate 110 a are completely overlapped and have a same projected area, and the buffer region S locates among the electrode pads 172, the substrate 110 a and the connection layer 126 a. Therefore, when the light emitting device 100 l is in the fabrication process, the buffer region S can serve as a buffer between the electrode connection layer 120 a and the electrode pads 172 under the operation in different temperatures, so as to increase the reliability of the light emitting device 100 l. The material of the electrode pads 172 can be selected from chromium, tin, indium, platinum, gold, an alloy of materials selected from the above materials or a combination of the above materials, so as to have a good bonding effect between the electrode connection layer 120 a and the electrode pads 172.

It should be noticed that in other embodiments that are not illustrated, the aforementioned elements such as the spaces 117 g 1, 117 g 2, 117 g 3 of the conductive through hole 116, the optical coupling layers 190 c 1, 190 c 3, 190 d, the sheet-like wavelength converting layers 180 a, 180 e, 180 f, the substrate 110 g, the electrode connection layer 120 h, the ohmic contact layer 210, the reflection layer 220, the insulation protection layer 230, the color mixing layer 240, and the electrode pads 172 can also be used, and those skilled in the art can determine the used elements based on the aforementioned description of the embodiments and according to an actual requirement, so as to achieve a required technical effect.

In summary, since the electrode connection layer of the invention has the buffer region which can serve as a buffer between the electrode connection layer and other layers having different thermal expansion coefficient from the electrode connection layer under different temperature variation operation, so as to increase the reliability of the light emitting device of the invention.

Although the invention has been disclosed with reference to the aforesaid embodiments, they are not intended to limit the invention. It will be apparent to one of ordinary skill in the art that modifications and variations to the described embodiments may be made without departing from the spirit and the scope of the invention. Accordingly, the scope of the invention will be defined by the attached claims and not by the above detailed descriptions. 

What is claimed is:
 1. A light emitting device, comprising: a substrate, having an upper surface, a lower surface opposite to the upper surface and a plurality of conductive through holes penetrating through the substrate and connecting to the upper surface and the lower surface; an electrode connection layer, disposed on the upper surface of the substrate and electrically connected to the conductive through holes, wherein the electrode connection layer has at least one first electrode, at least one second electrode and a connection layer disposed between the substrate and the first electrode and disposed between the substrate and the second electrode, the connection layer has at least one buffer region exposed on the upper surface of the substrate, and the buffer region is an empty gap; an epitaxial structure, disposed on the electrode connection layer and electrically connected to the electrode connection layer; and a plurality of pads, disposed on the lower surface of the substrate and connecting with the conductive through holes.
 2. The light emitting device as recited in claim 1, wherein a center width of the buffer region is smaller than an edge width of the buffer region.
 3. The light emitting device as recited in claim 1, wherein the pads have a distance therebetween, and a width of the buffer region is 0.1 to 1 times the distance between the pads.
 4. The light emitting device as recited in claim 3, wherein a width of the gap is 0.3 to 0.7 times the distance between the pads.
 5. The light emitting device as recited in claim 1, further comprising: an insulating layer, disposed on the electrode connection layer and insulating from the first electrode and the second electrode, wherein the at least one buffer region locates among the insulating layer, the connection layer, and the substrate.
 6. The light emitting device as recited in claim 5, wherein the epitaxial structure further comprises: a first type semiconductor layer, disposed on the insulating layer, wherein the first electrode penetrates through the insulating layer and be electrically connected to the first type semiconductor layer; a light emitting layer, disposed on the first type semiconductor layer; and a second type semiconductor layer, disposed on the light emitting layer, wherein the second electrode penetrates through the insulating layer, the first type semiconductor layer and the light emitting layer so as to electrically connect to the second type semiconductor layer.
 7. The light emitting device as recited in claim 6, further comprising: an ohmic contact layer, disposed between the first type semiconductor layer and the insulating layer.
 8. The light emitting device as recited in claim 7, further comprising: a reflection layer, disposed between the ohmic contact layer and the insulating layer.
 9. The light emitting device as recited in claim 6, further comprising: an insulation protection layer, covering an edge of the first type semiconductor layer, an edge of the light emitting layer, and an edge of the second type semiconductor layer, wherein an edge of the insulation protection layer is aligned with the edge of the insulating layer.
 10. The light emitting device as recited in claim 1, wherein an edge of the electrode connection layer is aligned with an edge of the substrate.
 11. The light emitting device as recited in claim 1, further comprising: a sheet-like wavelength converting layer, disposed on the epitaxial structure, wherein an edge of the sheet-like wavelength converting layer is aligned with an edge of the substrate.
 12. The light emitting device as recited in claim 11, wherein the epitaxial structure has a rough surface, and the rough surface and the sheet-like wavelength converting layer have micron-scale voids therebetween.
 13. The light emitting device as recited in claim 11, further comprising: an optical coupling layer, disposed between the sheet-like wavelength converting layer and the epitaxial structure.
 14. The light emitting device as recited in claim 12, wherein the optical coupling layer has a rough surface, and the rough surface and the sheet-like wavelength converting layer or/and the epitaxial structure have micron-scale voids therebetween.
 15. The light emitting device as recited in claim 11, further comprising: a color mixing layer, disposed on the sheet-like wavelength converting layer, wherein an edge of the color mixing layer is aligned with the edge of the sheet-like wavelength converting layer.
 16. The light emitting device as recited in claim 1, wherein each of the conductive through holes and the corresponding electrode connection layer have at least one space therebetween.
 17. The light emitting device as recited in claim 16, wherein the space penetrates through the substrate and connects the upper surface and the lower surface.
 18. The light emitting device as recited in claim 16, wherein the space extends along a direction from the upper surface to the lower surface and has a bottom surface.
 19. The light emitting device as recited in claim 16, wherein the space locates inside the conductive through hole.
 20. The light emitting device as recited in claim 1, wherein the at least one first electrode is a plurality of the first electrodes, the at least one second electrode is a plurality of the second electrodes, a profile of each of the first electrodes when viewing from atop is in a point shape, and a profile of the second electrodes when viewing from atop is a combination of a point shape and a line shape.
 21. The light emitting device as recited in claim 1, further comprising: a plurality of electrode pads, disposed on the upper surface of the substrate and connecting the conductive through holes and the electrode connection layer, wherein an orthogonal projection of the electrode pads on the substrate and an orthogonal projection of the connection layer on the substrate are completely overlapped and have a same projected area. 